摘要
验证了测量平面面形误差的重叠四步平均算法(OAF)应用于测量微小球面曲率半径的可行性。采用Linnik显微移相干涉装置,测量了光纤连接器端面的曲率半径,给出了测量数据及处理结果;通过对已知曲率半径的标准微小凸球面样板的测量,得到相对误差为0.093%。同时,从理论上对OAF和其他算法对PZT位移误差的抑制能力作了分析比较。结果表明,OAF算法可用于微小球面曲率半径的测量,且相对于其他算法而言,其对PZT位移误差具有更强的抑制能力。
Originally Overlap Averaging 4-Frame algorithm （OAF） is used for measuring flatness error. Now the feasibility of applying OAF algorithm to measure the radius of curvature （ROC） of mini-sphere is verified. By using Linnik-type microscopic interference system, the ROC of a fiber connector was determined, the measurement data and the processing result were given. To inspect the systematic error of the algorithm, a standard mini-sphere with ROC of 9.96 mm was measured and the relative error was 0.093%. Moreover, the effects of calibration error and non-linearity of PZT on ROC measurement are compared for OAF and other algorithms. Experiment and analysis results show that OAF algorithm is completely applicable to mini-sphere ROC measurement, and it has stronger capability in suppressing phase-shifting error effect than other algorithms.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2006年第9期1159-1162,共4页
Chinese Journal of Scientific Instrument
基金
南京理工大学校基金资助项目
关键词
显微干涉
移相干涉术
算法
曲率半径
光纤连接器
microscopic interferometry phase-shifting interferometry algorithm radius of curvature fiber optic connector
