摘要
本文用模态分析法详细分析了压电双晶片力、振动、粗糙度传感器的位移特性及灵敏度特性 ,并给出了灵敏度与压电材料参数及晶片几何尺寸的关系 .
In this paper, the performance in displacement and sensitivity are analyzed deta iledly for force, vibration, and roughness sensors using modal analysis method. The connection of the sensitivity with the material parameters and the dimension s of the piezoelectric bimorph are presented.
出处
《传感技术学报》
CAS
CSCD
2000年第4期281-286,共6页
Chinese Journal of Sensors and Actuators
关键词
压电传感器
灵敏度分析
振动传感器
力传感器
piezoelectric sensors\ \ sensitivity analysis\ \ vibration sensors\ \ forsors r oughness sensors
