摘要
文中用模态分析法详细分析了压电双晶片力、振动、粗糙度传感器的位移特性及灵敏度特性 ,并给出了灵敏度与压电材料参数及晶片几何尺寸的关系。
In this paper, the performance in displacement and sensitivity are analyzed detailedly for force, vibration, and roughness sensors using modal analysis method. The relationship of the sensitivity between the material parameters and the dimensions of the piezoelectric bimorph are presented.
出处
《仪表技术与传感器》
CSCD
北大核心
2000年第7期27-29,共3页
Instrument Technique and Sensor
关键词
压电双晶片传感器
模态分析
Piezoelectric Sensors
Sensitivity Analysis
Vibration Sensors
Force Sensors
Roughness Sensors
