摘要
为了减少生化传感器中样品的消耗,基于行波原理,本文设计了一种新型的压电式微流泵。首先,理论证明了行波的产生机理,并用流体仿真软件Fluent进行了验证;其次,设计并制作了锯齿沟道和直沟道两种结构的微流泵,在压电双晶片阵列的驱动下,测量了这两种微流泵在不同频率和电压下的特性。结果表明锯齿形沟道结构的压电式行波微流泵性能更优良,在幅度为26 V,频率为1 437 Hz,占空比为1的方波驱动下,它的最大流速和最大背压分别是33.36μL/min和1.13 kPa,能够满足生化检测中动力输送要求。
Based on the theory of traveling wave,a new piezoelectric micropump is presented in this paper to reduce the sample.Firstly,the principle of traveling wave is proved and simulated by Fluent software.Secondly,two different micropumps with straight microchannel and saw-tooth microchannel are designed and fabricated.Driven by piezoelectric actuator array and home-made circuit,the characteristics of the two micropumps are tested at different frequencies and applied voltages.Result shows that the micropump with a saw-tooth microchannel has a better performance,which has the maximum flow rate of 33.36 μL/min and back pressure of 1.13KPa under square signal with amplitude of 26V,frequency of 1437Hz and 1∶1 duty ratio,the micropump can satisfy the power transportation in biochemical detection.
出处
《传感技术学报》
CAS
CSCD
北大核心
2011年第11期1517-1521,共5页
Chinese Journal of Sensors and Actuators
基金
国家大学生创新实验计划(091005511)
国家自然科学基金项目(60574091
60871028
61001056)
天津市科技计划项目(06YFGPGX08700
08JCYBJC12500
09ZCKFGX01200
10JCZDJC15300)
关键词
生化传感测量
微流泵
行波
压电双晶片
锯齿沟道
biochemical sensing detection
micropump
travelling wave
piezoelectric bimorph
saw-tooth microchannel
