摘要
针对现有纳米测量技术量程小和测量环境要求苛刻等不足,提出研究一种以高频时钟脉冲作为计量基准的新型纳米位移传感器,利用差动平行电容极板构建的交变电场进行精密测量。为了优化传感参数并提高测量精度,对纳米时栅传感器在不同参数条件下的电场分布与误差特性进行了研究。首先根据其测量特征,利用ANSYS软件建立二维仿真模型,对不同参数条件下传感器的电场分布进行分析;再通过实验验证,找出不同参数与误差特性之间的关系;最后根据仿真和实验结果,对传感参数进行优化设计。实验表明:在200 mm测量范围内,传感器精度达到±300 nm。为纳米时栅优化设计和精度提高提供了可靠的理论依据和技术支持。
Aiming at the deficiences of small measurement range and critical requirement on measurement environment in existing nanometer measurement technologies, a new nanometer displacement sensor is proposed,which adopts high- frequency clock pulse as the metrological reference;and the alternating electric field constructed with differential and parallel capacitance plates is used to perform the precise measurement. In order to optimize the sensor parameters and improve measurement precision, the electric field distribution and error characteristics of the nanometer time-grating sensor are studied under different parameter conditions. Firstly, according to the characteristics of the nanometer time grating displacement sensor measurement model, a two-dimensional simulation model is built using the ANSYS software to analyze the electric field distribution under different parameter conditions. The relationship between the model pa- rameters and error characteristics is obtained with experiment verification. Based on the simulation and experiment re- suits ,the sensing parameters can be optimized. The experiment results prove that the precision of the sensor reaches ＋ 300 nm within the measurement range of 200 ram. The study result provides a reliable theoretical basis and technical support for the design optimization and precision improvement of nanometer time-grating sensor.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2013年第10期2257-2264,共8页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金(51175534)
重庆市杰出青年科学基金(cstc2011jjjq70002)资助项目
关键词
纳米测量
电容式位移传感器
时栅
电场分布
误差特性
nanometer measurement
capacitive displacement sensor
time grating
electric field distribution
error characteristic
