摘要
研制了一种新型的折叠腔法-珀干涉仪,可适用于测量范围为100 nm以内的纳米级及数十毫米内的亚微米级位移测量,测量不确定度优于2nm。
A new folded-cavity Fabry-Perot interferometer has been developed for measuring micro-displacement in the range of 100nm to several decade millimeters. The uncertainty of measurement is less than 2nm.
出处
《计量学报》
CSCD
1993年第2期94-98,共5页
Acta Metrologica Sinica
关键词
干涉仪
测量
位移
Fabry-Perot interferometer
Nanometer
Submicrometer
Measurement
