摘要
评述微系统的 3维成形、空间运动机构制作和微作业技术。提出了微系统的定义 ,指出了它区别于宏系统、微电子系统的特点及这些特点对上述 3个技术的影响。评述了 L IGA、DRIE、EDM、微浮雕、折叠法、RPM 6种 3维成形法 ,并指出如何组合它们以适应微光学系统、微流体系统、微机构等商品化的配套需要。评述了微运动副的制造方法、带弹性变形件及柔性变形件的微机构设计原理和制造方法 ,并对它们的选择原则提出建议。评述了微物体在流体中的作业、微注射、狭窄空间中的作业、工作台—机器人系统上的微作业。提出了值得研究的若干课题群。
In this paper, three key technologies of 3D fabrication of micro systems, manufacturing of spatial motion mechanisms, and micro manipulation,are reviewed. Definition of micro systems is given. The features in which micro systems are different from macro systems and micro electron systems,and how these features effect on three key technologies above are surveyed. Three dimensional fabrication methods, such as LIGA, DRIE, EDM, micro relief, folding and RPM are described. These methods are related for commercialization need of micro optical systems, micro fluid systems and micro mechanisms. It is described how to design and manufacture micro motion pairs and micro mechanisms with elastic and flexible deformation parts. Suggestions of selecting rules of the design and manufacturing are given. Four methods such as manipulating micro objects in fluid, micro injection, manipulation in narrow space, and micro manipulation of worktable-robot systems are put forward. Finally, key research problem groups of micro systems are presented.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2000年第11期1305-1312,共8页
China Mechanical Engineering
基金
国家 8 6 3高技术研究发展计划资助项目! (86 3-5 11-943-0 1686 3-5 11-96 0 8-0 0 7)
江苏省社会发展资助项目! (BS970 83)
关键词
微系统
3维成形
空间运动机构
微作业
micro system 3D fabrication spatial motion mechanism micro manipulat0
