摘要
介绍了微型机械未来的研究内容及发展趋势。
Micro electro-mechanical system (MEMS) is the frontier field in high science and technology towards the 21st century. Future researching content and developing tendency of MEMS are introduced.
出处
《航空精密制造技术》
2006年第4期1-6,共6页
Aviation Precision Manufacturing Technology
关键词
微型机械
微流体力学
LIGA加工
micro electro-mechanical system
microfluidics
lithography galvanoformung abformung process
