摘要
聚二甲基硅氧烷(PDMS)微薄膜可作为高灵敏生物传感器的敏感单元。为了实现敏感单元的制备,往往需要进行揭膜。采用对衬底硅烷化的方法,研究了PDMS微薄膜的揭膜工艺。通过测试其旋涂衬底:玻璃片、Si片的表面静态接触角,实验证明三甲基氯硅烷(TMCS)可改善衬底疏水特性,在硅烷化10 min后,PDMS微米级薄膜可从衬底完整揭下。同时,研究表明浓硫酸和过氧化氢混合液可增强玻璃片亲水性并促进硅烷化,以及在氢氟酸处理Si片时,Si片疏水性随浸泡时间先增强后减弱。
Dimethylsiloxane （PDMS） membrane can be as the sensitive element of biosensors.When PDMS is assembled in biosensor as the sensitive element,it is generally needed to be completely peeled off from substrate.The PDMS membrane-stripping process based on silanization of the substrate is studied.The wettability of glass slides and silicon substrate are measured.The results show that trimethylchlorosilane （TMCS） can enhance hydrophobicity of the substrate.After 10 minutes＇ silanization of substrate,the PDMS membranes can be easily peeled off.In addition,it is found that concentrated sulfuric acid and hydrogen peroxide can improve hydrophilicity of glass slides and promote the silanization process.The hydrophobicity of silicon substrate is increased and then decreased with the treatment time by hydrofluoric acid.
出处
《现代化工》
CAS
CSCD
北大核心
2013年第9期142-145,共4页
Modern Chemical Industry
基金
中国博士后科学基金特别资助项目(2012T50248)
国家自然科学青年基金资助项目(51105267)
国家教育部博士点基金资助项目(20111402120007)
山西省回国留学人员科技活动项目择优资助项目(2011x10)
