摘要
设计了一种具有三明治结构的微结构驻极体膜,采用旋涂、"软刻蚀"等工艺,结合氧等离子体键合、恒压电晕放电技术,以铜网作为电极,摸索出完整的工艺流程,制作了基于微结构PDMS驻极体的柔性压电俘能器。测量了驻极体膜的压电系数以及力-电特性。结果显示,微结构PDMS压电俘能器的压电系数(d33)为25pC/N;在5N周期性压力下,最大能够产生1.98Vpp的开路电压;驻极体膜的谐振频率为32Hz,且产生的电压与受到的压力呈线性关系。
In this paper, a microstructured electret film with sandwich structure was designed. A flexible piezoelectric energy harvester based on microstructure PDMS electret was fabricated. The complete process was explored, including spin coating, “soft etching”, electron plasma bonding, constant voltage corona discharge technology and other processes. Copper net were used as electrodes. The piezoelectric coefficient and force-electrical characteristics of the electret film were measured. The results show that the piezoelectric coefficient （ d 33 ） of the PDMS piezoelectric energy harvester is 25 pC/N, and the open circuit voltage of 1.98 Vpp can be generated at 5 N periodic force. The resonant frequency of the electret film is 32 Hz, and the resulting voltage is linearly related to the applied force.
作者
李铮
董维杰
朱慧超
LI Zheng;DONG Weijie;ZHU Huichao(Faculty of Electronic Information and Electrical Engineering,Dalian University of Technology,Dalian 116024,China;Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology,Dalian 116024,China)
出处
《功能材料》
EI
CAS
CSCD
北大核心
2018年第6期114-118,123,共6页
Journal of Functional Materials
基金
辽宁省科学技术计划基金资助项目(2014020009)
关键词
柔性压电俘能器
驻极体
PDMS
flexible piezoelectric energy harvester
electret
PDMS
