摘要
介绍了纳米加工中的光驻波场 ,分别对单反射面和双反射面形成的驻波进行了分析 ,并对不同区域的光强分布进行了理论推导。最后对如何形成高质量的光驻波场进行了探讨。
The light standing wave field in nanofabrication is introduced. The analysis for the standing wave formed in single reflecting surface and double reflecting surface is carried out,respectively.The light intensity distributions in the different zones are derived in theory.Some investigations are carried out for how the high quality standing wave field is formed in the end.
出处
《光电工程》
EI
CAS
CSCD
2000年第6期25-29,共5页
Opto-Electronic Engineering
基金
中国科学院知识创新工程资助项目!(A2 K0 0 0 9)
关键词
纳米加工
光驻波
光强分布
光场
Nanofabrication
Light standing wave
Light intensity distribution
