摘要
为了获得紫外荧光二氧化硫分析仪中所需的213.4nm激发光,研究了采用色散型紫外滤光器的参数优化,系统分析了装置中入射和出射狭缝对输出光的强度、稳定性及光谱纯度的影响,探讨了其物理机制,并通过实验得到了该装置中的最优参数为入射狭缝宽度50μm,出射狭缝宽度40μm。该结果对于提高仪器的准确性、灵敏度及长期稳定性等性能参数有重要意义。
In order to obtain the 213.4 nm excitation light required by the UV fluorescence sulfur dioxide analyzer, it was studied the parameter optimization of using dispersive ultraviolet filter, and the impact of the entrance and exit slits on the intensity, stability and spectral purity of the output light was systematically analyzed in the equipment and the physical mechanisms were discussed. The results show that the optimal parameters of the equipment can be set as entrance slit of 50 μm and exit slit of 40μm, which is of great significance for improving the accuracy, sensitivity, and long-term stability of the analyzer.
出处
《半导体光电》
CAS
CSCD
北大核心
2013年第4期702-705,共4页
Semiconductor Optoelectronics
基金
广东省教育部产学研结合项目(2007B090400135)
关键词
紫外荧光
二氧化硫分析仪
紫外滤光器
ultraviolet fluorescence
sulfur dioxide analyzer
ultraviolet filter
