摘要
在简要分析和对比各种检测导轨直线度方法的基础上,提出利用激光跟踪仪测量超长导轨直线度的方法,对该方法的基本原理和实现步骤进行了分析和研究。结合工程实例,对一数控机床的20m超长导轨进行了直线度测量,得到其2个方向上的直线度分别为27μm和25μm。该方法拓宽了激光跟踪仪的现有功能,能精确快速地完成对超长导轨直线度的检测,并可以实现对超长导轨2个方向直线度的分离,测量导轨的长度可达到70m,检测精度为0.4μm/m。
On the basis of summing up conventional linearity error testing for guideway,a novel method for testing linearity error of very long guideway by laser tracker is proposed.The basic principle and testing processing of the method are analyzed and researched.A long guideway of 20 m is measured by this method,the linearity error of each direction is 27 μm and 25 μm respectively.This method enlarges the ability of the laser tracker,it can test the linearity error of long guideway precisely and swiftly,and it can separate the linearity error of two directions,the longth of measurement guideway can reach 70 m,and the testing precision is 0.4 μm/m.
出处
《应用光学》
CAS
CSCD
北大核心
2013年第4期686-689,共4页
Journal of Applied Optics
基金
863基金资助项目(08663NJ090)
国家自然科学基金重点项目(61036015)
973基金资助项目(2011CB0132005)
国防项目(YOJGJX0036)
关键词
光学检测
直线度
激光跟踪仪
超长导轨
optical detection
linearity error
laser tracker
long guideway
