摘要
分析了双基圆盘式渐开线测量仪的测量原理,其具有结构简单、测量过程中无测头位置引起的阿贝误差等特点。该仪器采用交叉弹簧片的铰链结构作为误差传递杠杆,其灵敏度高、无间隙。经过对仪器的主要测量误差源进行补偿后,其系统的测量不确定度(U95)<±0.5μm,测量精度可以满足1级渐开线齿形的测量要求。通过与其它渐开线齿形测量方法的比较,双基圆盘式渐开线测量仪仅在测量自动化和多功能性等方面不如CNC齿形量仪,其在测量精度与制造经济性等方面更具优势,是超精密渐开线齿形测量的理想方法。
A double-disc mode instrument for measuring involute tooth profile is analyzed, which has some advantages, such as simple structure, no Abbe error caused by the stylus, etc. The instrument adopts an intersect coach spring structure as the error transfer lever, which has high sensitivity and no gap. After compensating major measurement error sources, the double-disc mode instrument’s uncertainty of measurement （U95） is less than ±0.5μm, which can meet measurement specification of the involute tooth profile of level 1 gear. Comparing with CNC instruments for measuring gear tooth profile, the double-disc instrument＇s automation and multifunction performance are insufficient, but it has advantages in accuracy of measurement and manufacturing economical efficiency, etc. The result shows that the double-disc mode is an ideal method for measuring ultraprecision involute tooth profile.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2006年第6期980-985,共6页
Optics and Precision Engineering
基金
国家自然科学基金资助项目(No.50475151)
关键词
精密齿轮
渐开线齿形
测量原理
双盘式测量仪
precision gear
involute tooth profile
measuring principle
double-disc mode instrument
