摘要
以TiCl4 ,SrCl2 ·6H2 O为主要原料 ,采用溶胶 -凝胶法制备出掺Al3+的钛酸锶薄膜 ,分析了薄膜的表面形貌和晶相组成 ,并比较了铝含量不同的SrTi1-xAlxO3-δ薄膜的氧敏性能 .实验结果表明 :掺摩尔分数为 0 .0 1的铝的钛酸锶薄膜表现出较高的氧敏性 ,但是 ,铝的掺入并没有消除钛酸锶薄膜的半导特性在中性气氛附近从n型向p型转变 .在此基础上 ,又合成了SrTi0 .99Al0 .0 1O3-δ-CrOx 复合膜氧敏材料 ,该复合膜在 70 0℃下可掩盖SrTi0 .99Al0 .0 1O3-δ薄膜的半导特性从n型向p型转变 .
The Al_doped SrTiO 3 thin film was prepared by sol-gel method using TiCl 4, SrCl 2·6H 2O as main raw materials. The SEM and X -ray diffraction were employed to detect the surface structure of the film. The oxygen_sensitivities of the thin films with different alumina content were also studied. The experimental results show that the SrTi 0.99 Al 0.01 O 3-δ thin films has the best sensitivity to oxygen. However, the n-p transition has not been eliminated. Additionally,SrTi 0.99 Al 0.01 O 3-δ -CrO x complex thin films can cover up the deficiency of n-p transition in SrTi 0.99 Al 0.01 O 3- δ thin films at 700 ℃.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2000年第5期419-421,共3页
Journal of The Chinese Ceramic Society
基金
国家"8 63"新材料资助项目! (71 5-0 1 2 -0 1 50 )
ToyotaCo .资助项目
关键词
钛酸锶薄膜
氧化铬
复合薄膜
氧敏性
掺铝
strontium titanate thin film
chromium oxide
complex thin film
oxygen_sensitivity
doping
