摘要
扫描电子显微镜主要用于样品形态观察,图像立体感强。但是在观察过程中经常因为荷电效应,影响图像质量,消除荷电效应在扫描电镜使用过程中非常重要。文中对荷电效应产生原因进行论述,并对减轻荷电效应的常规方法进行说明。比较TV拍照、积分拍照、慢拍照的33种拍照方式。重点探讨积分拍照方式消除荷电效应的影响,在实际应用中取得满意的图像效果。
The scanning electron microscope is mainly used for the observation of sample morphology, which owns strong image three- dimensional. However, it often affects image quality because of the effect of the charge during the process of observation. Elimination of charge effect in the scanning electron microscope using the process is very important. This paper discusses the reason to induce charge effect, and introduces the conventional method to alleviate the effects of charge into the description. In comparison with the TV shooting, integral shooting, and slow shooting three ways to take pictures, we focused on the way of integral photograph to eliminate the effect of charge, and we achieved a satisfactory image in the practical application.
出处
《实验科学与技术》
2013年第2期22-23,共2页
Experiment Science and Technology
关键词
扫描电子显微镜
积分拍照
图像
荷电
scanning electron microscope
integral shooting
images
charge
