摘要
针对零差正交激光干涉仪在直线运动测量中的误差来源及其影响,说明了零差激光干涉仪两路正交干涉信号中零漂、幅度误差以及相位误差等典型的非线性因素对位移测量的影响。本文采用一种简单的方法首先去除了干涉信号中的零漂与幅度误差,详细论述了正交相位误差对振动与冲击位移测量的影响,通过试验与理论分析的方式确定了相位误差引起位移测量误差的大小及误差性质。提出了对相位误差进行修正的办法,并通过装置试验验证了该方法的有效性,为整个标准装置的不确定度评估以及干涉仪的调试提供了参考。
The influence and origin of quadrature phase shift on the measured rectilinear displacement measurement error was investigated using a homodyne laser interferometer with a quadrature output. Common nonlinearities, including zero-shift, different amplifier gains and phase shift are three typical errors for displacement measurements. A simple method was used to determine and correct the zero shift and unequal gains, and the influence of the phase-shift was described in detailed experimentally, including the effective way to correct phase error. The effectiveness of the method was validated by comparing the displacement error before and after phase shift error-corrected. Moreover, the method can be applied to assess standard machine and adjust interferometer.
出处
《光电工程》
CAS
CSCD
北大核心
2012年第12期55-62,共8页
Opto-Electronic Engineering
基金
国家质检总局质量安全与量值传递项目(22-ALC1201)
关键词
零差激光干涉仪
正交信号
相位修正
直线运动
误差分析
homodyne interferometer
quadrature signal
phase correct
rectilinear displacement
error analysis
