摘要
本文简述微波腔体微扰方法测量湿度、厚度等非电量的原理.根据电磁场理论,导出分辨率公式.计算及实验均表明,用微波腔体微扰方法测量非电量具有高的分辨率.文中还介绍几种检测腔体失谐的方法,着重讨论了鉴相方法和实验结果.
In this paper, the principles of the moisture, density and thickness measurements of material are discribed.According to the theory on the electromagnetic field, the formula of resolution with a cavity sensor will be deduced. The calculated and experimental results show that the measuring method of non-electrical parameters with the microwave cavity by perturbation has a high resolution. The measurement with a cavity for resonance frequency difference and phase shifts due to the introduced material is discussed. The main technical requirements are given.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
1990年第2期211-216,共6页
Research & Progress of SSE
