摘要
本文讨论微波固体源作为测量电量、非电量有源传感器的工作原理。指出频带反射高Q腔稳耿氏振荡器适于作为有源传感器,用它取样测量电容介质(ε_τ(?)2～3)薄膜的厚度,量程:200μm,分辨率≤±0.1μm,介质微扰稳频腔产生的振荡器频偏⊿f与其厚度d具有很好的线性关系。频偏的实验值与微扰方法计算值吻合良好。
In this paper,the principle of electrical and non-electrical measurements using a microwave solid state source as an active sensor has been studied to confirm the suitability of Gunn oscillator with high Q frequency band reflactive cavity. The oscillating frequency shift Δf produced by an inserted dielectric material was measured. It has linear relation to dielectric thickness with a resolution of less than ± 0. lμm. Experimental results are in good consistent with calculated values by the perturbation method.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
1992年第1期71-76,共6页
Research & Progress of SSE
关键词
微波
固体
有源传感器
传感器
Microwave Solid Active Sensor, Circular TE011 Cavity, Oscillator
