摘要
介绍超精密加工技术及其应用背景、发展动向 ,以及超精密加工关键技术的一些最新成果。从超精密加工技术推广应用的角度阐述其模块化、廉价化发展趋势 ,同时就如何发展诸如模块化部件、执行系统、测量控制和环境控制等超精密加工关键技术提出一些新的观点和方法。
This paper describes ultra-precision machining technology, its application background and its recent development. The trend of modularization and cheapenation is described in detail from the point of view of widespread application of this technology. Some new ideas about modular component, actuating system, measurement technology, and environment control are pointed out in order to promote the technology.
出处
《中国机械工程》
CAS
CSCD
北大核心
2000年第8期841-844,共4页
China Mechanical Engineering
关键词
超精密加工
超精密数控
误差检测
超精密机床
ultra-precision machining machine tools ultra-precision numerical control error measurement
