摘要
介绍了超精密加工技术、应用背景、发展动向以及超精密加工关键技术的一些最新成果。从超精密加工技术推广应用的角度阐述了其精度目标、模块化、廉价化发展趋势 ,同时就如何发展超精密加工技术全面介绍了目前机床模块化部件、传动系统、检测环节、数控系统和环境控制等领域的最新研究水平和成果。
This paper describes ultra precision machining technology together with its application background and the latest development of its key points. The accuracy target and the trend of modularization and low cost are described in detail from the view of spreading application of ultra precision machining technology. Under the consideration of promoting technology level, the latest achievements in some key technologies are reviewed. These key technologies include modular component, actuating system, measurement technology, CNC system and environment controlling.
出处
《国防科技大学学报》
EI
CAS
CSCD
2000年第2期95-100,共6页
Journal of National University of Defense Technology
基金
国家部委项目资助
关键词
超精密加工
机床
误差检测
超精密车床
ultra precision machining
machine tools
ultra precision numeric control
error measurement
