摘要
用 EACVD法在硬质合金 ( YG6)刀具上沉积金刚石涂层 ;用氢微波等离子体刻蚀的方法对基底进行表面预处理 ,以期提高金刚石涂层的附着力和涂层刀具的切削性能 ;附着力采用压痕法计算测定 ,切削性能通过对碳化硅增强铝基复合材料的切削试验测定 ;用 X射线应力仪测试了涂层残余应力 ,并就不同预处理对性能的影响进行了分析和讨论。
The EACVD method is used to grow diamond coatings on WC Co (YG6) cutting tools Microwave plasma etching decarbonization pretreatment is performed in order to improve film adhesion between diamond coating and WC Co substrate Diamond coating adhesion strength is calculated by means of indentation test A real cutting performance is carried out on SiC reinforced Al matrix composite material Finally, film residual stress is measured and the influence of decarbonization pretreatment on film properties has been discussed
出处
《机械工程材料》
CSCD
北大核心
2000年第4期11-14,共4页
Materials For Mechanical Engineering
基金
国家高技术新材料领域基金!资助项目 (715 - 0 0 2 - 0 0 10 )
