摘要
折射率是反映薄膜成分以及致密性的重要指标,是检验薄膜制备质量的重要参数,其变化直接影响太阳能电池的转化效率。本文研究了不同射频功率、腔体压强、衬底温度以及硅烷和氨气配比等沉积条件对在太阳能电池上沉积的氮化硅薄膜折射率的影响,分析了氮化硅薄膜折射率随各沉积条件变化的原因。
Refraction index is an important parameter reflecting film composition and density. It also reflects preparation quality of thin film, which directly affects the transformation efficiency of a solar cell. This paper investigated the impact of radio frequency power, chamber pressure, substrate temperature and the ratio of saline and ammonia on the refraction index of silicon nitride thin film deposited on a c-Si solar cell. We analyze the reason that refractive index of azotized silicon thin film changes with different deposition conditions.
出处
《山东科学》
CAS
2012年第3期58-61,79,共5页
Shandong Science
基金
国家高技术研究与发展计划(863计划)重点项目(2012AA050303
2011AA050504)
山东省自主创新成果项目(2010ZHZX1A0702
2011ZHZX1A0701)
