4PALOURA E, NAUKA K, LAGOWSKI J. Silicon nitride films grown on silicon below 300 in low power nitrogen plasma [ J]. Appl Phys Let, 1986,49 : 97 - 99.
5ROHATGI A, CHEN Z, SANA P, et al. High efficiency multicrystalline silicon solar cells [ J ]. Sol En Mat And Sol Cells, 1994,34 (1/2/3/4) :227 - 236.
6ABERLE A G. Overview on SiN surface passivation of crystalline silicon solar cells [ J ]. Solar Energy Materials&Solar Cells,2001, 65 ( 1/2/3/4 ) :239 - 248.
7Paloura E,Nauka K, Lagowski J, et al. Silicon nitride films grown on silicon below 300 ℃ in low power nitrogen plasma [J]. Appl. Phys. Lett. , 1986,49 (2): 97-99.
8Aberle Armin G. Overview on SiN surface passivation of crystalline silicon solar cells [J]. Solar Energy Materials&Solar Cells, 2001,65 : 239-248.
