摘要
设计了一种高强度BRV真空火花光源,该光源辐射强度高、波段覆盖宽、光谱平滑连续、使用寿命长。其重复性、稳定性均优于15％,最适合在非同步辐射的一般实验室中使用。在VUV光谱学和软X射线显微术、光刻等研究及应用技术领域具有广泛的实用价值。本文阐述了光源的工作原理、设计思想和具体结构,给出了较理想的光谱测试结果。
A BRV intense vacuum spark source has been designed. It offers several advantages, high intensity, extended and smooth cont- inuum, a good viability. It is capable of producing a smooth conti- nuum spectrum from the visible down to at least 4nm. Its reproduci- bility and stability is found to be better than 15%. It is best suited to use in the general laboratories which do not require the specific properties of the synchrotron radiation. It has widespread practical value in the field of research and technology of VUV spectroscopy, soft X ray microscopy and photoetching etc. The paper mainly desc- ribes the operation principle, the design thought and the specific st- ructure of the source. The time-resolved spectra of the BRV plasma source has been studied at different wavelength in a range of 50-300 nm. The temp- oral response of optical pulse radiation on the order of millimicrosec- ond has been probed. We determined relative spectral distribution characteristic of the source. It is discussed that the influence of se- veral outer discharge parameter on the spectral characterlstic and the discharge stability. By adding a cap made of teflon on top of the an- ode, the reproducibility and radiance have been improved further.
出处
《光学机械》
CSCD
1991年第2期6-11,共6页
