摘要
为了直接获得工作状况下的漏率 ,在模拟工况条件下 ,采用氦质谱检漏仪正压检漏法可满足这样的要求。这种方法具有广泛地推广价值。介绍了此方法的意义、检漏过程及计算公式。
In order to gain the real leak rate under simulating operating conditions,using the pressurized leak detection method of helium mass spectrometer leak detector,the accurate data are obtained.The method is worth extensively recommendationing.The significance,test technique and calculating equation of the method are described in this article.
出处
《真空与低温》
2000年第1期58-60,共3页
Vacuum and Cryogenics
关键词
氦质谱检漏仪
正压检测法
正压校准漏孔
helium mass spectrometer leak detector, pressurized leak detection method, pressurized calibration leak
