摘要
介绍了常规扫描电子显微镜（SEM）的工作原理、缺陷及采取的改进措施。由此发展起来的环境扫描电子显微镜（FSEM）的性能已大幅度提高，其使用范围和领域大为扩展。
The performance and applications of conventional scanning electron microscope (SEM) are limited due to its working principle and construction, To overcome its shortcomings, two sigruficant meas were taken in the processof the development of SEM.First, the sample chamber was separated for electron column and the vacuum of the chamber was decreased, thus the sample chamber can sustain pressures as high as 10~3 Pa .Second, the environmental secondary detector (ESD ) was invented. The ESD is insensitive to light and heat, and can climinate automatically the charge accumulation on sample surface. These measures lead to the advent of environmental scanning microscope (ESEM) which is greatly improved in performance and there isnearly no limitations to its field of applications
出处
《分析仪器》
CAS
2000年第1期51-53,共3页
Analytical Instrumentation
