摘要
介绍了薄膜热电偶探测器的研究，讨论了薄膜热电偶探测器的结构对探测器响应特性的影响。
The thermal couples are useful detector in laser power or energy measurement or other areas.Now,we developed a novel thin film thermal couple detector deposited on high thermal conductive substrate.This paper described the manufacture parameters and the effects of construction on the response index,response time and noise of the thin film thermal couple detector.
出处
《激光技术》
CAS
CSCD
北大核心
1999年第2期122-125,共4页
Laser Technology
