摘要
运用正交实验法对图形转移干膜线宽损耗进行了分析,确定了影响干膜线宽损耗的主要因素,得出了最佳生产条件。通过验证实验及直观图验证了实验结果。
By applying the orthogonal experimental method, this paper analyzes the patteming dry film width loss, determines the major factors that impact the loss of dry film width, and concludes the best production conditions. By validation experiments and the intuitive map, it verifies the experimental results.
出处
《印制电路信息》
2011年第11期22-24,63,共4页
Printed Circuit Information
关键词
正交实验法
线宽损耗
Orthogonal experiment
the line width loss
