摘要
制冷机低温泵的入口障板，是低温泵设计中的重要部件。障板对来自抽气方向的热辐射的屏蔽效果。将直接影响泵的各项抽气性能。为了提高屏蔽效果，文中重点分析了障板的表面处理问题，以期得到障板对气体分子的流导系数和热辐射透过系数这一对互相矛盾的因素之间的最佳平衡及最好的应用效果。 文中例举了低温泵在大小不同的两台超高真空（ＵＨＶ）设备中的工程应用结果，并对障板表面在不同的处理情况下的应用效果进行了比较。实验结果证明了理论分析的正确性，即对于自屏蔽式障板，其内外两面均抛光镀银的效果明显优于表面涂黑的效果。
The entrance baffle of the refrigerator cryopump is an important element in the design of the cryopump. The shielding function of the baffle to the heat radiation coming from pumping direction will directly effect on the various pumping performance. In orders to enhance the shielding function. the surface treatment of baffle was analysed accentually in this paper for the purpose obtaining an optimal balance and the best application effect between the inconsistent factors e. g flow conductivity and transmission coefficient of heat radiation. The engineering application effect of refrigerator cryopump in the two different UHV facilities were exemplified in this paper. And the application effects of baffle surface under different surface treatment are compared. The experimental results demonstrated that the theoretical analysis is true, i.e the shielding function of the self-shielding baffle, its inside and outside surfaces polished and then coated silver were obviously superior to the surface painted with black.
出处
《真空》
CAS
北大核心
1990年第6期51-58,共8页
Vacuum
