摘要
低温泵的冷源是小型气体制冷机。制冷系统在长期运行中可能发生种种故障，使制冷工况发生变化。制冷机制冷工况的变化，对制冷机一，二级冷头的制冷量和制冷温度有明显影响，从而对低温泵抽气特性产生重大影响。
The mini-refrigerator is used as the condensation source of the modem cryopump. In the long term operation of the refrigeration system, various kinds of break-downs may occur, which results in changes in its operating conditions. Such vatiations in the operating conditions may significantly affect the performance of the cryopump,as well as the reffigeration capacities and refrigerated temperatures of the load of the lst and the 2nd stages.
出处
《真空科学与技术》
CSCD
北大核心
1998年第5期377-382,共6页
Vacuum Science and Technology
关键词
制冷工况
低温泵
抽气特性
制冷机
真空
Refrigeration condition, Cryopump,Pumping characterization
