摘要
按照正切规则，给出了不同夹具下与基片位置有关的薄膜微柱体的生长公式，并直 观地模拟计算了这些薄膜的微观结构，反映了不同夹具下生长的薄膜结构差异与特点。
The formulas growing the thin films under the various fixtures and related to substrate position have been given according to tangent rule. And the microstructures of these thin films have been computed by direct analogy, and the structural difference and features of the thin films growing under various fixtures are introduced.
出处
《真空》
CAS
北大核心
1990年第2期41-46,29,共7页
Vacuum
