摘要
现代精密光学系统的发展,对光学元件的加工和检测提出了非常严格的要求,达到纳米量级。相移式点衍射干涉仪是一种应用在纳米精度检测中的常用干涉仪,其参考波前由直径在几百纳米量级的小孔衍射产生,其衍射波前与理想波面的误差,决定了干涉仪的检测精度。基于有限元方法,计算了聚焦入射情况下,不同直径小孔的衍射波面。分析了聚焦斑发生对准误差和倾斜误差下,对衍射波面的影响。
The modern optical systems have placed stringent requirements on the manufactures and measurements of optical elements. Measurement accuracy of nanometer is needed. Phase-shift point diffraction interferometer is a common instrument in high-accuracy measurement, whose reference wave is generated by a pinhole with diameter of several hundred nanometers. So the measurement accuracy can be estimated by analyzing the diffracted reference wave. A two-dimensional simulation, based on finite element method （FEM）, is set up to study the propagation of the visible light of 632.8 nm wavelength, through sub-1000 nm diameter pinholes in a chromium membrane with different thicknesses. Beam spot alignment error and tilt are also analyzed.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2011年第12期39-44,共6页
Acta Optica Sinica
关键词
物理光学
光学检测
点衍射干涉仪
矢量衍射
波前分析
physical optics optical testing point diffraction interferometer vector diffraction wavefront analysis
