摘要
本文给出一种微振动振幅的精密测量方法.此方法采用光拍相位检测、伺服锁定干涉仪光程差和窄带检测技术,大大提高了信噪比.微振动振幅检测灵敏度达2.2×10^(-2)(?)/Hz^(1/2)(2kHz信号).
A precise measuring method of micro-vibration amplitude is reported. Optical heterodyne phase detecting technique, servo looking for the optical path difference of interferometer and narrow band detecting technique are used. The signal to noise ratio is improved greatly. The sensitivity of amplitude measuring can reach 2.2×10-2 A/ (2 kHz signal).
出处
《光学学报》
EI
CAS
CSCD
北大核心
1989年第12期1092-1097,共6页
Acta Optica Sinica
基金
国家自然科学基金
关键词
光拍相位检测
振幅
伺服锁定
振动
optical heterodyne phase detection
narrow band detection
servo looking.