摘要
在多结太阳电池结构中,P型锗单晶片不仅作为衬底,也是整体电池结构中的一个结。在外延生长过程中,需要进行多次异质外延生长,因此,对P型锗单晶片的表面质量提出了更高的要求。通过对P型锗片去蜡技术的研究,提高了锗片表面质量,降低了外延生长过程中雾缺陷的比例。
In the construction of multi-junction solar cells,the p-type germanium polished wafers was not only used as the substrate of the solar cells,but also used as one part of the junction.During the MOCVD process,it was grown some layers on the germanium polished wafers by the hetero-junction epitaxial growth process.So the germanium polished wafers had the perfect surface quality in order to get the lattice match.In the article,the surface of the Ge polished wafers was greatly improved by researching the dewaxing technology.
出处
《电子工业专用设备》
2011年第7期17-19,共3页
Equipment for Electronic Products Manufacturing
关键词
锗
清洗技术
去蜡技术
多结太阳电池
Germanium
Cleaning technology
Dewaxing technology
Multi-junction solar cell
