摘要
报道了用喷雾热分解法在不同温度下制备二氧化锡薄膜， 发现其在３２５℃时已晶化， 得到四方相多晶ＳｎＯ２。这种薄膜具有明显湿敏效应。测量表明， 较高湿度区阻值随湿度变化近似线性， 从高湿到低湿平均为每上升１％ ＲＨ， 阻值下降８．８Ω， 响应速度小于１ 分钟，
Using spray pyrolysis we prepared SnO 2 thin film successfully on glass deposited at various temperatures.Results show at depositing temperature of 325℃ the SnO 2 thin film is crystallized.In high humidity area,its relation of impedance and humi dity is approximately linear.With increasing of every 1%RH,the impedance decrease 8 8Ω.Response velocity is less than 1min.And its recovery of impedance is easy.
出处
《半导体技术》
CAS
CSCD
北大核心
1999年第6期42-44,共3页
Semiconductor Technology
