摘要
用电子束研制不同介质膜作绝缘层的掺铒硫化锌交流电致发光薄膜器件，用Ｘ射线衍射技术测量薄膜表面结构，发现薄膜多晶的沉积有择优取向的趋势。观察不同绝缘层交流电致发光器件的初始稳定过程，讨论绝缘层质量对交流电致发光器件的影响。
The devices of ZnS:Er 3+ thin film of alternating current electroluminescence (ACEL) are prepared with different insulation dielectric film respectivily. Their insulation layers are prepared by electron beam evaporation. The crystallite structure of the ZnS:Er 3+ films are measured by using X ray diffraction (XRD) technology. The results show that the deposited polycrystalline films have a trend of preferred orientation. The originally electroluminescence steady process of the thin film devices with different insulation layers are observed, and the effects of prepared insulation dielectric layer quality on alternating current electroluminescence are discussed as well.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
1999年第3期294-297,共4页
Research & Progress of SSE
基金
福建省自然科学基金
关键词
薄膜结构
交流电致发光
硫化锌薄膜
Thin Film Structure Alternating Current Electroluminescence Insulation Dielectric Layer
