摘要
利用射频磁控溅射法制备硫化锌薄膜，用Ｘ射线衍射、透射电镜、研究薄膜的结构相变，揭示了硫化锌薄膜的微观结构和相变特征．
The zinc sulfide thin film are prepared by radio frequence magnetron sputtering (RFSP). The structure and phase transition of film are evaluated with X ray diffraction (XRD) and transmission electronmicroscope (TEM). The researches show some characteristics of micro structure and phase transition of ZnS thin film prepared by RFSP. All of these can be used to gain understanding of the mechanism of TFEL and to find new EL material with high brightness.
出处
《厦门大学学报（自然科学版）》
CAS
CSCD
北大核心
1997年第1期52-56,共5页
Journal of Xiamen University：Natural Science
基金
福建省自然科学基金
关键词
射频磁控溅射
硫化锌
薄膜
制备
溅射法
Radio frequence magnetron sputtering, Micro structure,Phase transition characterization
