摘要
用化学共沉淀法制备的铟锡氧化物复合粉末经冷等静压成形后进行热等静压致密化所得靶材常常会产生裂纹．用电子探针分析了铟锡氧化物热等静压后裂纹处铟、锡和氧的成分分布．结果表明，裂纹处铟含量极低，锡含量极高，而氧含量低于配比含量，这与Ｉｎ２Ｏ３ 和ＳｎＯ２ 在高温下不同的分解行为有关；粉末经高温煅烧预处理后，进行热等静压致密化所获得的靶材的相对密度可达到９８ ％ 以上，且裂纹大大减少．
Indium Tin Oxide (ITO) complex powders synthesized by chemical co precipitation method were densified by HIP technique. The target was to form cracks. The element distribution of In,Sn and O was analyzed at the place of cracks in ITO ceramics by means of HIP (hot isostatic pressing)method. The results show that there is little In but much Sn around the cracks,and the content of oxygen is less than that of ration in the materials, which is due to the differennt decomposition of In 2O 3 and SnO 2 at high temperature. And the forming of cracks can be diminished by pre treatment of powder at high temperature. The relative density of targets is above 98%.
出处
《中南工业大学学报》
CSCD
北大核心
1999年第6期608-610,共3页
Journal of Central South University of Technology(Natural Science)
基金
国家"九五"科技攻关计划资助
