摘要
简述了ITO薄膜的各种性能和主要应用,综述了国内外ITO靶材的主要成形、烧结工艺及其研究现状,概括了ITO靶材的发展趋势。
The performance and application of ITO film were described; the forming and sintering processes in China and abroad were summarized; the developing trend of ITO target was prospected.
出处
《热加工工艺》
CSCD
北大核心
2012年第24期31-34,37,共5页
Hot Working Technology
基金
新国家自然科学联合基金资助项目(u0837601)
新国家基金资助项目(50874054)
云南省创新团队(2009CI003)
云南省自然科学基金资助项目(2008CD087)
