摘要
采用溶胶凝胶法在石英基体上制备了纯TiO2薄膜,并通过离子注入方法对TiO2薄膜进行Fe掺杂改性以促进TiO2薄膜光吸收边红移,提高其光吸收性能。利用XRD、XPS及UV-vis对不同注入剂量的Fe掺杂TiO2复合薄膜的晶相结构、原子化学态以及光吸收性能进行了表征。XRD测试结果表明,溶胶凝胶法制得的TiO2薄膜为锐钛矿相,经Fe离子注入后,复合TiO2薄膜经退火后锐钛矿相消失,金红石相出现,因为Fe3+离子进入晶胞代替Ti4+,在TiO2基体形成铁的固溶体,结果氧空缺形成促进了TiO2从锐钛矿向金红石的转变;XPS测试结果表明,经过退火Fe在复合TiO2薄膜中以Fe和Fe3O4形式存在,说明Fe离子进入TiO2晶格取代Ti,但Fe及其氧化物晶体峰未在XRD上观测到,说明两者结晶程度不高,以非晶形态存在;通过对溶胶凝胶法制备的TiO2薄膜注入不同剂量Fe的复合薄膜的紫外-可见吸收光谱分析可知,由于复合薄膜中Fe3O4的存在,使复合薄膜紫外-可见光吸收边发生了红移,并随注入剂量增加红移增大,根据红移效果确定Fe的适宜注入剂量为1×1017 cm-2。
By using the sol-gel method,TiO2 thin films were fabricated onto quartz substrates,and then modified by Fe introduced with ion implantation method to promote the absorption shift to visible region and enhance optical absorption of TiO2 thin films.XRD,XPS and UV-vis were used to characterize the phase structure,the atomic chemical states and optical absorption of these composite TiO2 thin films in different implantation dose.The XRD results indicated that TiO2 films obtained by sol-gel method were anatase.Fe implantation resulted in the disappearance of anatase and the occurrence of rutile.Since Fe3＋ substituted Ti4＋ in unit cell,so there was a solid solution of iron in TiO2 matrix.As a result,oxygen vacancies facilitated the transformation of TiO2 from anatase to rutile.XPS results revealed that Fe existed as elemental Fe and Fe3O4 in the films,indicating that the Ti in the lattice of TiO2 was substituted by Fe ion.However,No diffraction peaks of Fe and its oxides were observed,showing their non-crystalline structures.The UV-VIS results of Fe-implanted TiO2 films with various Fe dose exhibited that the absorption edge shifted to a longer wavelength due to the existence of Fe3O4.Furthermore,this red shift increased with a higher implanted Fe dose and the optimal Fe implantation dose 1×1017 cm-2 was determined accordingly.
出处
《稀有金属》
EI
CAS
CSCD
北大核心
2011年第2期249-252,共4页
Chinese Journal of Rare Metals
基金
国家自然科学基金(50802061)资助项目
