摘要
本文研究了In_xSb_(1-x)(x=0.27～0.45)的溅射薄膜从非晶态到晶态的相变动态过程,及该系统薄膜在相变过程中电性质的变化,还讨论了非晶态In-Sb薄膜的结构变化与电性质的关系.
We investigated the dynamic processes of the phase transition of InxSb1-x (x=0.27-0.46) alloy films. The changes of the electrical properties due to the phase transition were studied. The relationships between the electrical properties of In-Sb films and their structures were discussed.
出处
《应用科学学报》
CAS
CSCD
1989年第2期124-128,共5页
Journal of Applied Sciences
基金
国家基金
