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放电脉冲重频准分子激光器在不同应用领域的发展现状(英文) 被引量:3

Development of discharge pulse repetition rate excimer lasers for different applications
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摘要 研究了脉冲宽度为25~40 ns的放电脉冲XeCl准分子激光器的工作参数。结果显示,激光器产生的脉冲能量为0.2~0.7 J,重复频率为100 Hz,表明在泵浦功率为2.8~3.3 MW/cm3时,激光器实现了2.6%的激光效率和3.8%的本征效率。 The working parameters of the discharge pulse-periodic XeC1 lasers with pulse duration of 25 -40 ns are researched. Results demonstrate that the lasers generate the pulses of radiation with energies of 0. 2 - 0. 7 J and operate with a repetition rate up to 100 Hz. It is shown that the total laser efficiency of 2. 6% and the intrinsic efficiency of 3.8% are realized with the pumping power of 2.8 - 3.3 MW/cm3.
出处 《中国光学》 EI CAS 2011年第1期1-8,共8页 Chinese Optics
基金 Supported by Russian Foundation for Basic Research Project(No.10-08-90002a)
关键词 准分子激光器 泵浦功率 体放电 预电离 激光效率 脉冲持续时间 气体混合物 excimer laser pumping power bulk discharge preionization laser efficiency pulse duration gas mixture
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参考文献12

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