摘要
用射频磁控溅射方法在有机柔性衬底上制备出附着性好、电阻率低、透射率高的ＺｎＯ：Ａｌ透明导电膜。研究了薄膜的结构。
Transparent conducting ZnO:Al films with good adhesion,low resistivity and high transmittance have been prepared on the organic substrate by r.f.magnetron sputtering.The structural,electrical and optical properties of the obtained films were studied.
出处
《太阳能学报》
EI
CAS
CSCD
北大核心
1999年第2期200-203,共4页
Acta Energiae Solaris Sinica
基金
国家自然科学基金
