摘要
绒面ZAO(ZnO∶Al,氧化锌铝)透明导电膜在硅基薄膜太阳能电池领域应用前景广阔,本文利用直流磁控溅射方法,采用氧化锌铝陶瓷靶材制备了ZAO透明导电膜,并用自制的腐蚀液对膜层进行腐蚀以便形成太阳能电池所需要的表面凹凸起伏的绒面结构。研究了不同镀膜温度对膜层性能的影响,不同退火条件下膜层热稳定性的变化情况,不同腐蚀时间下膜层电阻、透过率以及表面形貌的变化,结果表明,在相同真空度、溅射功率和节拍的情况下,220℃下制备的ZAO透明导电膜膜层性能最好,腐蚀时间为30 s时获得的绒面效果好。
Textured transparent conductive ZAO thin films have good prospects in application to the silicon-based thin film solar cells.With the ZAO ceramic target used in DC magnetron sputtering process,the ZAO films were prepared,and they were etched by the liquids we made to obtain the required surface with textured structure.The dependence of film performance on temperature and thermal stability of films annealed on different conditions,and the resistance,transmittance and surface morphology of ZAO films etched for different time were investigated.The results showed that with the same vacuum degree,sputtering power and rhythm,the best ZAO films can be prepared at 220℃ with best textured structure obtained when the etching time is 30sec.
出处
《真空》
CAS
北大核心
2010年第5期28-30,共3页
Vacuum
关键词
ZAO透明导电膜
直流磁控溅射
热稳定性
绒面结构
ZAO transparent conductive film
DC magnetron sputtering
thermal stability
textured structure
