摘要
以二水合醋酸锌为原材料,采用溶胶-凝胶浸涂法在钠钙玻璃基片上制备了具有c轴择优取向的ZnO:Al薄膜,考察了铝掺杂浓度对薄膜结晶性与微观组织结构的影响。结果表明:铝掺杂使ZnO薄膜(002)晶面的2θ向高角度方向偏移,c轴择优取向性增强,晶粒变小(15～20nm)。当铝掺杂浓度(摩尔分数)为1%～2%时,微观组织结构变得致密均匀;当铝掺杂浓度大于2%时,发生颗粒团聚现象;在高掺杂浓度下(5%和8%),出现大尺寸片状ZnO:Al晶粒异常长大,生长出特殊形貌的薄膜。
Al-doped zinc oxide thin films with c-axis-preferred orientation were prepared on soda-lime glass substrates via sol-gel dip-coating route by using zinc acetate dihydrate as the starting materials. The effects of Al-doping concentration on the crystallinity and microstructure of the films were systematically studied. The results show that Al-doping benefits c-axis-preferred orientation and leads to 20 of （002） plane shifting to higher angle. The grains with sizes of 15-20 nm are refined with increasing Al-doping concentration. A homogeneous dense microstructure is obtained when Al-doping concentration （mole fraction） is 1%-2% while there are particle agglomerations when the Al-doping concentration is above 2%. As for higher doping concentration （5% and 8%）, the films exhibit the exceptional growth of large plate-like crystals and grow into a special morphology.
出处
《中国有色金属学报》
EI
CAS
CSCD
北大核心
2009年第7期1284-1288,共5页
The Chinese Journal of Nonferrous Metals
