摘要
利用压缩空气雾化器，通过喷雾热分解法，以ＳｎＣｌ２·２Ｈ２Ｏ为原料，在载玻片上成功制备了ＳｎＯ２薄膜。在１１０℃到３６５℃间的不同沉积温度下进行镀膜，考察了沉积温度、沉积时间对ＳｎＯ２薄膜制备的影响。结果表明：在３２５℃的沉积温度下，薄膜已晶化。随温度升高，喷雾时间增加，方块电阻降低。３２５℃下的样品在可见光区透射率达８０％以上，近红外区透射率达９０％以上。
Using SnCl22H2O as precursor,we prepared SnO2 thin film successfully on glass deposited at various temperature between 110 and 365 by spray pyrolysis.Effects of spray time and depositing temperature on the property of conduction and transparency of SnO2 thin film were investigated.The results showed:at depositing temperature of 325 the SnO2 thin film had crystallized;while the depositing temperature and spray time increasing the square resistance of SnO2 thin film decreased;the visible transmission of SnO2 thin film is higher than 80% and it's near-infrared transmission is higher than 90%.
出处
《功能材料》
EI
CAS
CSCD
北大核心
1999年第3期313-313,316,共2页
Journal of Functional Materials
