摘要
金刚石厚膜片是采用化学气相沉积的方法制备出来的一种全晶质多晶纯金刚石材料,其物理性能和天然金刚石非常接近.而化学性质则完全相同。本文对CVD金刚石厚膜刀具的研究进展、制备方法、性能特点、切削试验结果及应用前景进行了简要的综述。
CVD diamond film is a pure diamond material with full polycrystallinity rnariufactured by chemical vapor deposition. Itcan be adhered to substrate surface in a thin film form, or can be in a thick sheet form of freestanding. Its physical propertyis much closer to that of natural diamond, and its chemical characteristic is the same as that of natural diamond. This reviewis mainly focused on the research developments, characterlstics, machining test results and application prospects of CVD di-amond film coated tools.
出处
《硬质合金》
CAS
1999年第2期98-103,共6页
Cemented Carbides
基金
广东省高教厅基金!960004
省高教厅重点学科资助