摘要
微型阀是微流体测量系统的重要组成部分，本文提出了一种微型光敏聚酰亚胺被动阀，分析了该材料性能，叙述了微型阀的特点、结构设计和工艺流程，并讨论了加工过程中的一些关键技术。
Microvalve is a key element of micro flow control system.This paper presents a novel passive microvalve which is made of a material——photosensitive polyimide(PSPI).The features of PSPI are analyzed,structure design and fabrication processes of PSPI microvalve are described and some key technical problems in fabrication are discussed.
出处
《半导体情报》
1998年第3期43-47,共5页
Semiconductor Information
