摘要
采用激光干涉检测的方法,综合应用计算机控制、数字图像处理等技术对高精密仪器主动镜的偏转角进行了检测.设计了主动镜的光干涉CCD数字图像检测系统,推导出了干涉条纹与主动镜偏转角之间的对应数学关系式,对条纹图像进行了噪音分析和相应的预处理,在干涉条纹细化的基础上对每条干涉条纹采用最小二乘法进行直线拟合,得到条纹间的间距以及条纹的方向角,最终检测出主动镜X轴方向的偏转分辨率为0″.113,最大偏转角为56″.872,Y轴方向的偏转分辨率为0″.112,最大偏转角为49″.835,完成了主动镜偏转角的检测.
Abstract： Using laser interference technology, computer control technology and data image processing technology, the CCD interferometer measuration system is designed. Then, the mathematical model between the interferogram and the tip-tilt angles is deduced. After preprocessing the interferogram and thinning the fringes,least square method is used to fit the fringes. Based on equal thickness interferometer theory, the tip-tilt angle parameters of the active mirrors are obtained. The X axis＇s movement range is 56″. 872, and the resolution is 0″. 113. The 17 axis＇s movement range is 49″. 835 ,and the resolution is 0″. 112.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2010年第6期1111-1115,共5页
Acta Photonica Sinica
基金
国家自然科学基金(60908039/F0513)资助
关键词
主动镜
偏转角
干涉条纹
Active mirror
Tip-tilt angle
Interference fringes
